Asset # : 33697
Equipment Make: Nanometrics
Equipment Model: RPM Blue
Type: Wafer Laser Measurement Tool
Wafer Size:
Equipment Configuration:

Laser Type: Model 378nm Cube
Manufacturer: Coherent
Output Wavelength (nm) 378nm
PSU/Controller:N/A
Output Power Direct from Laser:17.7mW At sample: 14.4mW
Spot size on RPM entry slit 1.2mm
Power Stability 0.15%
Calibration Serial 18137
Genmark Wafer Loader
F/W Version GB4P-6.03
End-Effector Serial A 8506
Software Version 8.15
110 Volts // 50/60 Hertz

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  • Added: March 20, 2018

  • Views: 248

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