Asset # : 33697
Equipment Make: Nanometrics
Equipment Model: RPM Blue
Type: Wafer Laser Measurement Tool
Wafer Size:
Equipment Configuration: Laser Type: Model 378nm Cube Manufacturer: Coherent Output Wavelength (nm) 378nm PSU/Controller:N/A Output Power Direct from Laser:17.7mW At sample: 14.4mW Spot size on RPM entry slit 1.2mm Power Stability 0.15% Calibration Serial 18137 Genmark Wafer Loader F/W Version GB4P-6.03 End-Effector Serial A 8506 Software Version 8.15 110 Volts // 50/60 Hertz

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  • Added: March 20, 2018

  • Views: 182

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