Alcatel Speeder 100 Si ICP DRIE
Asset # :
33415
Equipment Make:
Alcatel
Equipment Model:
Speeder 100 Si
Type:
ICP DRIE
Wafer Size:
4"
Equipment Configuration:
– Bosch Deep Si Etching
– Mechanical Clamp with the backside cooling for precise temperature control
– Chuck Temperature is controller using Liquid Nitrogen (LN2)
– Gasses: C4F8, SF6, 02
– HF and LF Etching possible
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Added: October 9, 2020
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Views: 392