Alcatel Speeder 100 Si ICP DRIE

Asset # : 33415
Equipment Make: Alcatel
Equipment Model: Speeder 100 Si
Type: ICP DRIE
Wafer Size: - Bosch Deep Si Etching - Mechanical Clamp with the backside cooling for precise temperature control - Chuck Temperature is controller using Liquid Nitrogen (LN2) - Gasses: C4F8, SF6, 02 - HF and LF Etching possible
Equipment Configuration:

4″

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  • Added: October 9, 2020

  • Views: 257

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