Veeco Nexus LDD Ion Beam Deposition System

Asset # : 33345
Equipment Make: Veeco
Equipment Model: Nexus-LDD
Type: Ion Beam Deposition System
Wafer Size: - Brooks Automation SLR 200X-rot 30M/L. The tool is designed to handle 6” reticles - Load chamber, process chamber, controls, pumps for process chamber, another view of process chamber, other side of load chamber, control racks, 2 pumps (IQDP40 & IQDP80), 3 compressors (CTI 9600), power panel - The tool was operational and last used in 2015
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  • Added: March 20, 2018

  • Views: 19

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