Veeco Nexus LDD Ion Beam Deposition System

Asset # : 33345
Equipment Make: Veeco
Equipment Model: Nexus LDD
Type: Ion Beam Deposition (IBD)
Wafer Size:
Equipment Configuration:

– Brooks Automation SLR 200X-rot 30M/L. The tool is designed to handle 6” reticles
– Load chamber, process chamber, controls, pumps for process chamber, another view of process chamber, other side of load chamber, control racks, 2 pumps (IQDP40 & IQDP80),

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Ad Details

  • Added: March 20, 2018

  • Views: 76

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