Veeco Nexus LDD Ion Beam Deposition System
Asset # :
33345
Equipment Make:
Veeco
Equipment Model:
Nexus LDD
Type:
Ion Beam Deposition (IBD)
Wafer Size:
Equipment Configuration:
– Brooks Automation SLR 200X-rot 30M/L. The tool is designed to handle 6” reticles
– Load chamber, process chamber, controls, pumps for process chamber, another view of process chamber, other side of load chamber, control racks, 2 pumps (IQDP40 & IQDP80),
Equipment Pictures:
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Added: March 20, 2018
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Views: 76