Alcatel 601 E Deep Reactive Ion Etcher (DRIE) Sold
Asset # :
32640
Equipment Make:
Alcatel
Equipment Model:
601 E
Type:
DRIE
Wafer Size:
6"
Equipment Configuration:
– Mechanical Clamp
– Backside He Cooling
– RFPP RF20S RF Generator
– RFPP LF-5 RF Generator
– Alcatel Adixen Turbo Pump
– Vacuum Pump & Chiller
– Pump
– Chiller
Current Gas Configuration:
– SF6
– C4F8
– CHF3
– O2
– AR
– N2
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Added: October 9, 2020
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Views: 660