Alcatel 601 E Deep Reactive Ion Etcher (DRIE) Sold

Asset # : 32640
Equipment Make: Alcatel
Equipment Model: 601 E
Type: DRIE
Wafer Size: 6"
Equipment Configuration:

– Mechanical Clamp
– Backside He Cooling
– RFPP RF20S RF Generator
– RFPP LF-5 RF Generator
– Alcatel Adixen Turbo Pump
– Vacuum Pump & Chiller
– Pump
– Chiller

Current Gas Configuration:
– SF6
– C4F8
– CHF3
– O2
– AR
– N2 
Equipment Pictures:
Alcatel-601 E-Deep Reactive Ion Etcher (DRIE)-32640 For Sale

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Alcatel-601 E-Deep Reactive Ion Etcher (DRIE)-32640 Refurbished

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Alcatel-601 E-Deep Reactive Ion Etcher (DRIE)-32640 For Sale Online

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Alcatel-601 E-Deep Reactive Ion Etcher (DRIE)-32640 Image 1

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  • Added: October 9, 2020

  • Views: 660

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