Alcatel 601 E Deep Reactive Ion Etcher (DRIE) Sold

Asset # : 32640
Equipment Make: Alcatel
Equipment Model: 601 E
Type: Deep Reactive Ion Etcher (DRIE)
Wafer Size: - Mechanical Clamp - Backside He Cooling - RFPP RF20S RF Generator - RFPP LF-5 RF Generator - Alcatel Adixen Turbo Pump - Vacuum Pump & Chiller - Pump - Chiller Current Gas Configuration: - SF6 - C4F8 - CHF3 - O2 - AR - N2 
Equipment Configuration:

6″

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  • Added: October 9, 2020

  • Views: 282

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