Axcelis / Fusion Gemini Photostabilizer GPS UV Cure System Sold

Asset # : 28641
Equipment Make: Axcelis / Fusion
Equipment Model: Gemini Photostabilizer GPS
Type: UV Cure System
Wafer Size: 8"
Equipment Configuration:

– Two 8″ Open Cassette Stations
– Process Chamber mWave PS: HV-SMPS
– System SW (OS): WinNT 4.0 SP 6
– System SW (App): Version 3.43
– Standard & CR Manuals
Not Included: Mini-Environment, Backing Pumps, Chiller

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  • Added: June 14, 2018

  • Views: 1206

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