Gasonics Aura 1000–Sold
Asset # :
11766
Equipment Make:
Gasonics
Equipment Model:
Aura 1000
Type:
Wafer Size:
6"
Equipment Configuration:
Wafer Type Semi Flat
Signal Tower No
Ce Mark (Europe) Yes
Pump Chamber 1 – Alcatel Rsv 601 + 2063 – Not Included
Pump Chamber 2 – Alcatel R601B + 2063 – Not Included
Gas
O2 (Chamber 1) 5 Slpm
N2 (Chamber 1) 500 Sccm
N2 (Chamber 1) 2 Slpmm
N2 (Chamber 1)
Equipment Pictures:
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Added: January 31, 2018
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Views: 387