Asset # : 11766
Equipment Make: Gasonics
Equipment Model: Aura 1000
Type:
Wafer Size: 6"
Equipment Configuration:

Wafer Type Semi Flat
Signal Tower No
Ce Mark (Europe) Yes
Pump Chamber 1 – Alcatel Rsv 601 + 2063 – Not Included
Pump Chamber 2 – Alcatel R601B + 2063 – Not Included
Gas
O2 (Chamber 1) 5 Slpm
N2 (Chamber 1) 500 Sccm
N2 (Chamber 1) 2 Slpmm
N2 (Chamber 1) 1 Slpmm
Power
380 V / 50 Hz / 3 Ph

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  • Added: January 31, 2018

  • Views: 211

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