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KLA-Tencor SP 1-TBi Inspection System 70009
Price: $0
- Asset # : 70009
- Make : KLA-Tencor
- Model : SP 1-TBi
- Type : Inspection System
- Wafer Size :
- Configuration : - Windows NT, RAM 523700 KB - SP1 SW version 3.50.2304 - Oblique Option, XY Enhancement - 488 nm 30mW Argon – Ion Laser wavelength - Optics configuration: DWO,DNO,DWN,DNN - Note: DWO: Dark field Wide channel Oblique path, DNO: Dark field Narrow channel Oblique path / DWN:Dark field Wide channel Normal path, DNO : Dark field Narrow channel Normal path - Max sensitivity: 0.060um on DWO (oblique? HS, 0.083am on DWN (normal/HS) (KT OEM specification) - Note : 0.102um on DWO / DNO / DWN / DNN (HS mode) for used tool - Support 8 & 12’’ chuck and scan stage - 1x 300mm FOUP - Single puck handling system with mapping function - OS & Application software: Windows NT4.0 & MX4.0 - GEM/SECS (HSMS)function - TFT Flat panel display - Defect map and histogram with zoom - Micro view measurement capability - Cassette locator with mapping function - Support wafer thickness: 625~775 um - X-Y coordinates function - Blower unit 1.16 - Dual HDD System (Master HDD for use , Slave HDD is for backup) 2001 Vintage
KLA-Tencor SP 1-TBi Inspection System 70009
$0.00
Out of stock