Back to store
Price: $69,300
Hitachi S 5000 Field Emission Scanning Electron Microscope (SEM) -67362
Price: $69,300
- Asset # : 67362
- Make : Hitachi
- Model : S 5000
- Type : Field Emission Scanning Electron Microscope (SEM)
- Wafer Size :
- Configuration : - Ultra High Resolution - Accelerating Voltage: 30 kV - Magnification: 500,000x Performance - Image Resolution: 0.6 nm (at 30 kV),3.5 nm (at 1 kV) in secondary electron image Magnification - Low mag mode: x30 ~ x500 - High mag mode: x250 ~ x800,000 Electron Optics - Electron Gun: Cold field emission source - Accelerating Voltage: 0.5 ~ 30 kV (0.1 kV/step) - Lens System: 3 stage electromagnetic stage - Objective Operture:4 openings, selectable and alignable from outside of vacuum, anticontamination heater built in - Stigmator: Octapole electromagnetic type (X, Y) - Scanning Coil: 2 stage electromagnetic Specimen Stage - System: side entry type - Motion: X = +/- 3.5 mm (continuous) Y = +/- 2 mm (continuous) Tilt = +/- 40 Degrees (continuous) Tilt range is restricted by optional specimen holders and optional detectors - Specimen Size: 9.5 mm x 5 mm x 2.4 mm (h) for standard holder, 20 mm x 6 mm x 2.4 mm (h) (maximum) for larger specimen holder Specimen Exchange: Airlock type with prepumping Display System - Imaging Signal: Secondary electron image Back scatted electron image (option), X-ray image option - Scan Model: Normal scan, reduced area, line scan, photos scan, spot position, analysis scan, dual mag/split screen, oblique - CRT: 12 inch monitor for viewing x 2 sets, (12 inch color monitor at option), 7 inch photo recording/ultra high resolution monitor x 1 set - Frame Memory: 1, 024 x 1,024 pixel memory x 2 sets for slow scan image (4-split screen image can be recorded), 512 x 512 pixel x 1 set for viewing - Image Processing: Auto image brightness and contrast, gamma control, dynamic stigmator monitor, auto sigmator, dynamic focus, auto focus - Scan Speed: TV, 0.3, 2, 10 (9), 20 (25) s/frame for viewing, 40 (35), 80 (100), 160, 320 s/frame for recording, ( ): for 60 Hz line frequency operation - Electrical Image Shift: +/- 3 μm - Auto Data Display: Film number, accelerating voltage, micron bar, micron scale, magnification, and date are printed on film automatically Vacuum System - Vacuum Pumps: IP1: 60 1/s IP2: 20 1/s IP3: 20 1/s TMP: 340 1/s RP: 140 1/min (168 1/min) x 2 sets, ( ): for 60 Hz line frequency operation Security - The instrument is protected against power and vacuum failures Standard Equipment - Column (x1) - Display unit (x1) - Power supply (x1) - S-5080 Camera (x1) - Air compressor (x1) - Rotary pumps (x2) - Standard tool (1 set) - Spares and Consumables (1 set) - Instruction manual (x1) - Auto transformer (x1) Dimensions and Weight: - Column: 89(w) x 103(d) x 160(h) cm, 385 kg - Display: 110(w) x 90 (d) x 116 (h) cm, 235 kg - Power Supply: 54(w) x 63(d) x 150(h) cm, 215kg (Ion pump power supply, TMP power supply, stage control power supply, lens power supply) Rotary Pump: 54(w) x 22(d) x 41(h) cm, 32 kg x 2 sets Weight: 20(w) x 18(d) x 16(h) cm, 40 kg Air Compressor: 40(w) x 23(d) x 55(h) cm, 18 kg Auto Transformer: 33(w) x 35(d) x 38(h) cm, 72 kg 1998 Vintage
Hitachi S 5000 Field Emission Scanning Electron Microscope (SEM) -67362
$69,300.00