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- Asset # : 64441
- Make : Gasonics
- Model : L 3200
- Type : Asher
- Wafer Size : 4", 6"
- Configuration : - 2 quartz vacuum chambers - RF power supply - Mass flow controlled gas delivery system - Roughing pumps and pressure control systems (throttle valves) - Electronics control system - Automated robotic wafer handler - The Asher employs two modes of process termination – end point detection and end of process time - Missing ADE 350 Robot - can be run by manually loading chamber 1 wafer at a time