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Price: $349,100
Intevac -Matrix -Solar PVD Thin Film System -64134
Price: $349,100
- Asset # : 64134
- Make : Intevac
- Model : Matrix
- Type : Solar PVD Thin Film System
- Wafer Size :
- Configuration : Overview: - Multiple chamber system enabling multi-layer thin film solar cell PVD applications (IBC, Cu Seed, HJT, PERL/T) - Fully integrated automation for small substrate handling (low wafer breakage < 0.03%) - High speed transport and carrier technology for high system throughput (> 3000 wph, application dependent) - Enabling source technology (LSMA) for high target utilization and low cost of ownership - Integrated deposition chambers for advanced solar cell applications (Cu seed, PERL Back Metal, HJT) - Multiple chamber load locks enable high quality vacuum (low E-07) in small footprint - Short green-to-green time with chamber isolation (< 6 hours) - Easy carrier modification to accommodate different substrate shapes and sizes (156mm, 125mm, square and pseudo-square) Matrix Unique Design: - Single row carrier design enables efficient PVD system through compact chamber dimensions - Small carrier enables high productivity, low cost load / unload mechanism - Overhead carrier return reduces footprint - LSMA source enables lowest cost of ownership (target) Matrix Automated Substrate Handling: - Integrated automation load / unload - High throughput (> 3000 wph) - Reliable performance (< 0.03% breakage rate) - Flexible substrate sizes - Extendible to thinner wafers Matrix Automation: - Integrated automation load / unload - High throughput (> 3000 wph) - Reliable performance (< 0.03% breakage rate) - Flexible substrate sizes - Extendible to thinner wafers LSMA Source: - High target utilization (>65%) - Scanning pole - Tunable scan speed - High scan acceleration - Optimal edge erosion profile - Uniform target temperature control enables stable film properties - Planar target design beneficial for low target cost and complex materials - Magnet array is optimized to the target material - High magnet pole strength enables high pass-through flux (Magnetic films e.g. Nickel)
Intevac -Matrix -Solar PVD Thin Film System -64134
$349,100.00
Out of stock