Configuration:- Array of 1W (flux output) 365nm diodes (LED EnginLZ1 UV 365 LED)
- Configured for 230V power supply
- Lamphouse with mercury lamp
- 3"" wafer chucks
- 2"" and 4"" mask holders
- The pneumatics control box has leaky connections inside
- The machine originally had a mercury lamp and power supply. The power supply failed a few years ago, so an array of 365nm diodes were built into the light path. The system has good power at 365, but has a dark spot on the south east edge of the exposure area.
- Vacuum contact mode still worked
