Thermo Fisher Scientific / FEI Helios NanoLab 600 FIB (Focused Ion Beam)
- Dual beam
Vacuum system:
- Edwards XDS10 Scroll pump
- Sample stage: 5-Axes motorized X-Y-Z-rotate-tilt stage
- Step size: 100 nm (Minimum)
- High vacuum: 10^-10 mbar
Travel:
- X, Y-Axis: 150 mm
- Z-Axis: 10 mm
- Tilt range: -5° to +60°
Repeatability:
- 1 µm at 0°
- 2 µ at 52°
Electron optics:
- Magnetic immersion lens
- Ultrahigh brightness emitter
- Source: SCHOTTKY Field emitter
Accelerating voltage: 350 V to 30 kV (Continuously adjustable)
- Beam current: 1 pA - 22 nA
Resolution:
- 0.9 nm at 15 kV
- 1.4 nm at 1 kV
Ion optics:
- Sidewinder Field emission focused ion beam optics
- Liquid Gallium ion emitter
- Accelerating voltage: 0.5 kV to 30 kV (Continuously adjustable)
- Beam current: 1.5 pA - 20 nA
- Imaging resolution: 5 nm at 30 kV
- Milling resolution: 10 nn on Cr thin film
Scanner:
- High-resolution digital scanning engine
- Resolution: 512x442, 1024x884, 2048x1768, 4096x3536 pixels
- Minimum dwell time: 25 ns/pixel
- Electronic scan rotation by 360°
Patterning system:
- Maximum resolution: 64k x 64k
- Minimum dwell: 25 ns/pixel
- Maximum dwell: 25 ms/pixel
- Multiple pattern shapes
- Complex milling pattern through bitmap import
Detectors:
- In-lens SE and BSE True Lens Detector (TLD)
- Everhart-Thornely SE Detector (ETD)
- 14-Segments solid state STEM II detector
- Chamber viewing IR CCD camera
Controller:
- Microscope controller
- LCD Monitor, 19"
- Screen resolution: 1280x1024
- Optical mouse
- Chamber door mounted interface for manipulators
- Broad beam plasma source ion column (Focus 250 µm)
- Manuals included
- Does not include manipulator