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Veeco D 180 LDM MOVPE System
Veeco D 180 LDM MOVPE System
Veeco D 180 LDM MOVPE System
Veeco D 180 LDM MOVPE System
Veeco D 180 LDM MOVPE System
Veeco D 180 LDM MOVPE System
Veeco D 180 LDM MOVPE System
Veeco D 180 LDM MOVPE System
Veeco D 180 LDM MOVPE System
Veeco D 180 LDM MOVPE System
Veeco D 180 LDM MOVPE System
Veeco D 180 LDM MOVPE System
Veeco D 180 LDM MOVPE System

Veeco D 180 LDM MOVPE System

Asset #: 41819

Make: Veeco

Model: D 180

Veeco D 180 LDM MOVPE System
- Epitaxy of (In,Al,Ga)As on GaAs
- “Turbodisc” reactor with two heater zones, and three alkyl inlet zones
- Wafer surface temperature and growth rate via emissivity-compensated pyrometry
- Configured for 1x100mm wafer, or 3x75 mm wafers
- Gases: H2, N2, AsH3, 100 ppm Si2H6 in H2
- MO-sources: 2xTMGa, TEGa, 2xTMAl, TMIn, CBr4
- Thickness uniformity (AlGaAs): +/-0.4 % on 100 mm wafer, 5 mm exclusion

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