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Applied Materials Mirra 3400 CMP (Chemical Mechanical Polisher)
Applied Materials Mirra 3400 CMP (Chemical Mechanical Polisher)
Applied Materials Mirra 3400 CMP (Chemical Mechanical Polisher)
Applied Materials Mirra 3400 CMP (Chemical Mechanical Polisher)
Applied Materials Mirra 3400 CMP (Chemical Mechanical Polisher)
Applied Materials Mirra 3400 CMP (Chemical Mechanical Polisher)
Applied Materials Mirra 3400 CMP (Chemical Mechanical Polisher)
Applied Materials Mirra 3400 CMP (Chemical Mechanical Polisher)
Applied Materials Mirra 3400 CMP (Chemical Mechanical Polisher)
Applied Materials Mirra 3400 CMP (Chemical Mechanical Polisher)

Applied Materials Mirra 3400 CMP (Chemical Mechanical Polisher)

Asset #: 68347

Make: Applied Materials

Model: Mirra 3400

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Applied Materials Mirra 3400 CMP (Chemical Mechanical Polisher)
- Software version MB60a1
- (4) Titan 200mm, three chamber carriers
- (3) 20.0” coated platens, ISRM enabled
- ISRM Endpoint software version IB11H2
- Peristaltic pumps, (2) per platen
- Nova patterned recognition unit, none
- (4) 200mm wet cassettes, wet in wet out capable
- Tool was turned on and in functional condition, was in wet idle during visit, cross rotated, heads were all installed and moving through the wet idle sequence; no wafers were processed during my visit.
- Tool shows typical wear and tear from operation, dried slurry residue on surfaces inside the chamber.
- Front window has cracks from an impact, will need to be replaced.
- Wet tub may be difficult to clean, stained appearance.
- Generally, in good condition, did not remove covers during inspection, comments from those that have worked on the machine said the tool was a work horse that was very reliable.
2001 Vintage

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