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Aviza OMEGA I 2 L ICP Etcher (Inductively Coupled Plasma)
Aviza OMEGA I 2 L ICP Etcher (Inductively Coupled Plasma)
Aviza OMEGA I 2 L ICP Etcher (Inductively Coupled Plasma)
Aviza OMEGA I 2 L ICP Etcher (Inductively Coupled Plasma)
Aviza OMEGA I 2 L ICP Etcher (Inductively Coupled Plasma)

Aviza OMEGA I 2 L ICP Etcher (Inductively Coupled Plasma)

Asset #: 68137

Make: Aviza

Model: OMEGA I 2 L

Last Confirm Date: November 28, 2022

Aviza OMEGA I 2 L ICP Etcher (Inductively Coupled Plasma)
- BCI3 & CI2 fixed detector
- NH3 fixed detector
- Dry scrubber: 6t 2-slot catalyst barrel that can handle 2 types of gas
- ATH1300M ICP turbo pump upgrade
- 200 PIN ESC TI-200 Micron Assy
Parts:
- AE1513 RF generator (2)
- Betta Tech CU700 chiller
- Adixen ADP122LM dry pump
- Adixen ADD122P dry pump
- Adixen ADS602H dry pump
- SPTS Omega FXP HF bias M.U RF match unit
- MKS HEBP pressure controller
- Watlow CLS204 heater controller (2)
- APC Smart-UPS 3000 UPS
- ICP Chamber ceramic wall
- DC PC104 PSU
- Consumable parts
2007 Vintage

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