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SUSS MA 200 E Mask Aligner

Asset #: 67777

Make: SUSS

Model: MA 200 E

Wafer Sizes: 8 inch

Last Confirm Date: June 30, 2023

SUSS MA 200 E Mask Aligner, 8"
- Windows based with  Suss AL / auto align system
- PC -Aut. Adjustment ( Cognex Patmex ) TSA
- Lamphouse unit LH 1500
- Suss DVM 8 dual video Microscope (2CCD – Cameras /set of rotating Objectives L+R)
- Objective  5x, 10x, 20x (qty 2 each)
- Transport Plates (Kit MA200 / W100-200/Even)
- Exposure Chuck Prox/Cont W200
- Maskholder MA 200/TL/Prox/Cont/W200
- CIC1200 Lamp Power supply
- Set of Exposure optics Typ A / UV400
- Non-Contact Prealigner Station with IR – Sensor
- Operators Manual MA 200E English (Digi.)
- Optional: Suss Light intensity Meter incl. Probe 405NM
2003 Vintage

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