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Lam / Novellus Concept One PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Lam / Novellus Concept One PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Lam / Novellus Concept One PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Lam / Novellus Concept One PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Lam / Novellus Concept One PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Lam / Novellus Concept One PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Asset #: 60673

Make: Lam / Novellus

Model: Concept One

Lam / Novellus Concept One PECVD (Plasma-Enhanced Chemical Vapor Deposition)
- Nitride, Oxide SiO2
Includes:
- AE RFG 3000 High Frequency Generator
- AE PDX 1400 Low Frequency Generator
- MKS 600 Series Pressure Controller
- Watlow Chamber Temp Controller
- Granville Philips 375 Vectron Load Lock Pressure Ready VAT Adaptive Pressure Contoller
- Veruty FH45 Intermotor Fuse Holder
- 208V, 3Phase, 50/60Mhz 79A
- CVD Undoped Silane + SiN Trazar Amuz-1 RF Generator
- Power Distribution Cabinet
- Supply Valve Manifold with Guages & Dials
- Complete Set of Manuals
- Spares Include (6) Targets, (3) New AE Mass Flow Controllers, Spares Kits Seal Kits, Transducer, Filter & Ring Kits, RF Heather Assy Kits, Consumables, Cassettes

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