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KLA / Leica INS 3000 DUV Defect Inspection System
KLA / Leica INS 3000 DUV Defect Inspection System
KLA / Leica INS 3000 DUV Defect Inspection System
KLA / Leica INS 3000 DUV Defect Inspection System

KLA / Leica INS 3000 DUV Defect Inspection System

Asset #: 153672

Make: KLA / Leica

Model: INS 3000

Wafer Sizes: 8 inch

Last Confirm Date: April 21, 2026

KLA / Leica INS 3000 DUV Defect Inspection System, 8"
- Wafer transport check
- Auto Focus check for each lens
- Aperture operation check
- Upper END (soft limit) operation check
Defects:
- Auto Focus occasionally fails to engage (Works after pressing the button several times)
- DF (Dark Field) and CF (Confocal Mode) functions are inoperable
- Vibration isolation function failure
- Air regulator currently bypassed (※Believed to be due to a regulator malfunction)
- Joystick malfunction (Usable, but return action is sluggish)
- Three scratches present inside the eyepieces (both left and right lenses)
- Video printer / Confocal UV lamp power supplies are currently disconnected/unused
- Stage: Slight left-to-right tilt observed; minor scratches present
2001 Vintage

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