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Applied Materials Centura HTF EPI (Epitaxial Silicon Deposition)

Asset #: 145629

Make: Applied Materials

Model: Centura HTF

Last Confirm Date: November 20, 2025

Applied Materials Centura HTF EPI (Epitaxial Silicon Deposition)
‐ Centura 5200 HTF Toxic Epi mainframe 
- 480V/60Hz/600A                         
- Wide Body ENP loadlocks                        
‐ Wafer Mapping                            
‐ HP Robot                         
‐ Remote Center Finding      
- ATM Process          
‐ Epi chamber RP Position: A, B - EPI RP Chambers
   - Upper Lamp Module
- Lower Lamp Module
- AccuSETT Flowpoint Controller and
Handheld
- AccuSETT Valve                                                               
   - R3.4 Rotation Assy                   
   - Variable Speed Blower                          
‐ Chamber Position F: Single slot non-contact cooldown
‐ Upgraded Top Mount Gas Panel

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