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Lam / Novellus Concept Three Vector Express

Asset #: 132919

Make: Lam / Novellus

Model: Concept Three Vector Express

Wafer Sizes: 12 inch

Last Confirm Date: May 01, 2025

Lam / Novellus Concept Three Vector Express , 12"
- Software Version and Build: V6.07 / B97
- Label Kit: English
- Interconnect Cable Length: 100 feet
- Process Module Primary: ARC
- Process Module Secondary: SION
Liquid Delivery System
- RPC Generator: Astron EX
- RF Configuration: SIRF
- Heated Top Plate
- Preheat
- Top Plate Tubing Size: 1/4 in
- Chamber Hardware: Nickel Plated Standard
- Chamber Gate Valve: Chemraz
- HF Generator: Apex 5KW
- LF Generator: PDX 2500
- RF Sensor Board: Standard
- IREPD Controller: MKS 20704A-28818, RMU
- O-Rings: Chemraz
- Process Manometer: Standard
- Hastings Gauge PM
- Hastings Gauge Foreline
- View Ports: 4
- Servo Spindle
- Pedestal Options: Classic Conditioned 300mm
- Minimum Contact Area (MCA): Pin and Ball
- Carrier Ring: Standard Carrier Ring
- Showerhead: Standard
- Rapid Pin Kit
- Rapid Pin ReadyGas Box Options
- Exhausted Gas Box Disconnects
- Gas Box Interlock: H2 on Channel 3
- Gas Box Configuration: STD 13 Ch GB
- Non-Standard Gas Box Features
Front End Options
- UI Options: Ballroom
- UI Location: Left
- Signal Tower Options: 4 Color Light Tower
- Front Signal Tower Mount: Buzzer Arm Mount
- Facia Color: Sky White
- Facilities Configuration: Bottom
- ATM Robot: Brooks
- End Effector: Friction
- FOUP Count: 3
- Load Port Type: Brooks
- RFID Reader: Brooks
- Mini Environment Lamp Color: Yellow
- Light Curtain Option: Standard
- Additional Front End EMO
- Load Lock: Standard
- FFU Options: Standard
- Chase Computer OS: Windows 2000
- Chase Computer with Cart: 1
- Chase Computer Cable Length: 50 Feet
- Load Lock Pump: Kashiyama NV60
- Non-Standard Fornt End Feature
- Software / Hardware: QNX Factory Automation
2010 Vintage

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