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Hitachi HS 9050 Asher
Hitachi HS 9050 Asher
Hitachi HS 9050 Asher
Hitachi HS 9050 Asher
Hitachi HS 9050 Asher
Hitachi HS 9050 Asher

Hitachi HS 9050 Asher

Asset #: 131630

Make: Hitachi

Model: HS 9050

Wafer Sizes: 12 inch

Last Confirm Date: April 10, 2025

Hitachi HS 9050 Asher, 12"
- Multi-chamber
- HDD removed
- No software/ hard drives
- Copper
Mini-Environment Wafer Loading Module (EFEM)
- 3 ea 25-wafer FOUP-Capable Load Ports /W N2 purge
- Fan Filter Unit
- Four Axis Robot
- Centering Unit: V-notch alignment and centering
Man/Machine Interface Main Console
- Personal Computer (GUI PC)
- LCD Display
- Keyboard
- Pointing Device
Lock Room
Transfer Room
- Dual-Arm High Speed Vacuum Robot Assembly
Extended Module
- Buffer Room
- Transfer Room
- Dual-Arm High Speed Vacuum Robot Assembly
- Part number of pads for Vacuum Robot
Process Modules
- 7 chamber tool = Five (5) Ashing Units
- HS-9050 Ashing Unit Items
- Lambda Source Unit
- Capacitance Manometer (722B11TCD2FA) DG1
- RF Power Supply(AXG-5000β…’-27M-KE)
- Multi-wavelength EPD 0.1s sampling (Spectrometer)
- MFC Configuration for Ashing Unit
- MFC#N N2 Max Flow 20 L/min
- MFC#1 (*) O2 Max Flow 20 L/min
- MFC#2 Ar Max Flow 20 L/min
- MFC#3 H2 Max Flow 5 L/min
- MFC#4 N2 Max Flow 20 L/min
- MFC#5 (*) CF4 Max Flow 1 L/min
- MFC#6 (**) CO2 Max Flow 0.4 L/min
- MFC#7 He Max Flow 20 L/min
- MFC#8: Without gasline, without MFC
- MFC#9: Without gasline, without MFC
- MFC#10: Without gasline, without MFC
Process Modules - Two (2) Cooling Units

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