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EVG Gemini Automated Production Wafer Bonder
EVG Gemini Automated Production Wafer Bonder
EVG Gemini Automated Production Wafer Bonder
EVG Gemini Automated Production Wafer Bonder

EVG Gemini Automated Production Wafer Bonder

Asset #: 131559

Make: EVG

Model: Gemini

Last Confirm Date: April 10, 2025

EVG Gemini Automated Production Wafer Bonder
- with Face to Face Alignment
- Interlocked doors with signal light tower
- 4 Axis Industrial Robot
- EVG CIM Framework Software GUI (Graphical User Interface)
- Flexible process flow definition
- Drag and drop recipe programming
- Parallel processing of multiple jobs
- Automated recording of process and machine parameters
- Throughput optimized handling sequence
- Password protected user access levels
- Open cassette loading with empty/present sensor
- Wafer size: up to 8"/200mm
- Tooling included: 8” bond chucks (additional tooling can be offered)
- SmartView®NT Alignment Module with 5x Objectives
- 4 Bond modules with up to 550°C and 20kN bond force
- Formic Acid Bubbler option for purging formic acid vapor into bond chamber
- 1 purge gas line for process gas
- CE Certified
2014 Vintage

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