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KLA Surfscan SP 1 DLS Particle Defect System
KLA Surfscan SP 1 DLS Particle Defect System
KLA Surfscan SP 1 DLS Particle Defect System
KLA Surfscan SP 1 DLS Particle Defect System
KLA Surfscan SP 1 DLS Particle Defect System

KLA Surfscan SP 1 DLS Particle Defect System

Asset #: 127708

Make: KLA

Model: Surfscan SP 1 DLS

Last Confirm Date: April 30, 2026

KLA Surfscan SP 1 DLS Particle Defect System
- 300mm FOUP handler
- Unit is non-operational
- CPU and HDD were removed from system
- PS issues/storm and system repeatedly reboots itself
Repairs / Testing:
- Readjusted all voltages to specs
- Installed CPU and HDD back in for testing. Result: Monitor has No signal display during CPU boot up. Keyboard has no functionality. Replaced with new keyboard but same result.
- Removed and disconnected all boards from backplane for CPU testing only. Result: Monitor still has No signal display during CPU boot up
- Retested the CPU at bench test: CPU boots up with display but mouse and keyboard not working
- Retested on SP1 system test and results are unchanged.
- Need to start with new CPU replacement. Next suspected parts are backplane board or PWR Distribution board: Boards not available at this time. Need new CPU replacement to further troubleshoot
- 75mW Laser: visually still lasting, but unable to determine the life span or quality of the laser due to inaccessibility of LonBrowser diag file.
- Need replacement of Bright Field laser:  Hene 7mW laser PS is dead (Model: 103-2300-6-2 194016)
- Unable to continue further testing without CPU operational
- CPU board order and received from a supplier, board tested before shipping
- CPU board installed on the tool, tool powers on but no signal yet - possible wiring issue
2002 Vintage

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