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KLA Alpha Step 500 Profilometer
KLA Alpha Step 500 Profilometer

KLA Alpha Step 500 Profilometer

Asset #: 73025

Make: KLA

Model: Alpha Step 500

Wafer Sizes: 2, 3, 4, 5, 6, 12 inch

KLA Alpha Step 500 Profilometer, up to 6"
- Alpha-Step 500 Mainframe
- Up to 6"/150 mm Wafer Capable
- Measurement Resolution to 1 Angstrom
- Repeatability: 10Γ… (1s) or 0.1%
- Computer Controlled Scanning and Data Collection
- Comprehensive Data Analysis Software
- Intuitive User Interface
- Application
- Specific Recipes easily programmed
- Zoom Optics with Magnification up to 210x
- Multi-Scan average mode scans up to 10 times and then averages the scan before print out
- Powerful Data Analysis w/ up to 30

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