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Hitachi S 4700 FE-SEM (Field Emission Scanning Electron Microscope)
Hitachi S 4700 FE-SEM (Field Emission Scanning Electron Microscope)
Hitachi S 4700 FE-SEM (Field Emission Scanning Electron Microscope)
Hitachi S 4700 FE-SEM (Field Emission Scanning Electron Microscope)
Hitachi S 4700 FE-SEM (Field Emission Scanning Electron Microscope)
Hitachi S 4700 FE-SEM (Field Emission Scanning Electron Microscope)

Hitachi S 4700 FE-SEM (Field Emission Scanning Electron Microscope)

Asset #: 73077

Make: Hitachi

Model: S 4700

Hitachi S 4700 FE-SEM (Field Emission Scanning Electron Microscope)
- Chamber: Type II, 6”/150mm load lock
- Chamber: Type II, 6”/150mm load lock
- Set to run 4”/100mm customer wafers (customer to send sample wafers at time of order)
- Resolution: 1.5nm at 15KV and 12mm working distance
- 2.5nm at 1KV and 2.5mm working distance
- Magnification: 100 to 500,000x at High mag mode, 20 to 2000 at Low mode
- Electron Gun: Cold Cathode Field Emission electron gun
- Acceleration voltage: 0.5 to 30KV (in increments of 0.1 KV)
- Extracting voltage: 0 to 6.5KV
- Specimen Stage type II:
- Z movement: 2.5 to 30 mm (continuous), Tilt: 5 to +60o, Rotation: 360o
- X movements: 0 to 100mm, Y: 0 to 50mm (continuous)
- Specimen Size: 150mm max (in diameter, the Airlock specimen size)
- PC controlled using Hitachi PCSEM software and Win98 OS
- Vacuum system: three ion pumps, one diffusion pump and two RPs
- Chamber scope and monitor included
- Dual SE detector
- Semicap chamber view camera and monitor
- Oxford Inca 7200 EDX system (or equivalent)
- Detector area: 10mm2
- S-4700 Win XP OS Upgrade - Type 2N
- Includes PC Exchange, Imposer Board exchange, Latest PCSEM Software and Flat Panel Display (EIZO)
- Includes RS-232C or Ethernet I/F plus HiMouse
- PCI Software Upgrade
- To upgrade any Acquisition or Client Software from a previous version to current version

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