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SVGL Micrascan III Lithography System

Asset #: 37066

Make: SVGL

Model: Micrascan III

Wafer Sizes: 8 inch

Last Confirm Date: May 23, 2018

SVGL Micrascan III Lithography System, 8"
- 248nm (4x)
- Tracking Interface (DNS 80)
- Lens 248nm (4x)
- 0.6-0.4 NA
- Scan Field 26 x 32.5
- Resolution 250-180
- Cymer KRF Laser #EX 5700 15W
- 60 WPH Throughput
- Illuminators: Quadrupole, Annular, Conventional (0.3, 0.6, 0.8)
- 12 Slot 6" Reticle Library
- Class 1 Enclosure with Donaldson Chemical Filtration
- ECU Unit
1999 Vintage

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