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Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE
Pfeiffer / Alcatel Adixen AMS 200 DRIE

Pfeiffer / Alcatel Adixen AMS 200 DRIE

Asset #: 158231

Make: Pfeiffer / Alcatel

Model: Adixen AMS 200

Wafer Sizes: 8 inch

Last Confirm Date: September 08, 2026

Pfeiffer / Alcatel Adixen AMS 200 DRIE, 8"
- Power: 400 V, 50/60 Hz, 3-Phase
- Electrical Feed: 480 VAC to Tool
- Tool Supply: 208 V, 500 A, 3-Phase, 4-Wire
- Vacuum & Air Utilities
- Auto Load / Unload
- 1 Robot from cassette to chamber
- Single-Wafer Chamber for Deep Silicon Etch
- Process Gases: Ar, O2, N2, C4F8, SF6 & He
- RF Power: 5 kW
- Platen Power: 3 kW
- Cooling: Standalone Chiller
- Cryogenic Cooling: No
- Turbo Pump: Removed / Not Included
- Roughing Pump: Removed / Not Included
- Trap: Removed
- Foreline: Removed
- Spare Pumps: Availability TBD
- Additional Spares
- Spare Trap Available

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