SCIA Trim 200 Ion Beam Trimmer, 4", 6"
- Vacuum chamber with pumps (excluding roughing pump)
- Trimming arrangement with focused ion beam source, neutralizer & 4 axis
- Wafer chuck with mechanical wafer clamping & helium backside thermal contact
- Facility supply including 3 gas channels, compressed air and cooling water distribution
- Handling robot with cassette loading, vacuum pre-aligner and wafer-ID reader
- Control rack with electricity power supply and control PC
- SECS/GEM Interface for system software
- RGA Integration
- Additional gas channel
- Handling unit upgrade to MX500 with 2 load locks
- Process chamber
- Brooks MX 400 handling robot
- Axis systems (X,Y,Z, & phi Axis)
- SECS II according to SEMI E 5-0706 standard
- GEM according to SEMI E 30-1103 standard
- Lower level protocols HSMS-SS according to SEMI E 37-0303 standard
- RGA MKS HPQ3S for process monitoring
- Software, power supply, graneville phillips micro gauge
- RGA integration for early leak detection
- Integration of MKS instruments HPQ3S IP RGA to Ion beam trimming tool process chamber and into control software
- RGA measurements active in stand-by as well as during processing
- MKS Instruments HPQ3S IP RGA including wiring
- Software controlled angle valve between process chamber and RGA to protect filament during pressure increase
- Full integration into control software
- Connection of RGA via ethernet
- Manual control of RGA to start measurement for selected masses
- Visual output of measurement
- Alarm threshold & tolerance time for 14 individual masses, averaging over defined time period possible
- Logging of up to 14 different masses in online & off-line trend
- Integration of relevant information into production log
- Automatic start of measurement with process start (when wafer is on chuck), to be switched on & off in general recipe parameters (not selectable for individual recipes)
- SECS/GEM Integration of the selected masses & current status
- 7 additional gas channel, inert, 1/4"
- 1 mass flow controller (MKS) with 2 bellow sealed pneumatically operated valves
- Gas piping in 1/4" stainless steep with VCR fittings
- Gas cabinet in system frame
- complete software & hardware integration
- Handling unit upgrade to MX 500 with 2 load locks
- Handling platform Brooks MX 500 with 2 cassette load-locks instead of MX 400 with 1 load-lock
- Wafer loading over 2 cassette load-locks in order to reduce pump down time after wafer cassette exchange
2015 Vintage