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Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)
Veeco Spector Ion Beam Deposition (IBD)

Veeco Spector Ion Beam Deposition (IBD)

Asset #: 156557

Make: Veeco

Model: Spector

Last Confirm Date: July 21, 2026

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Veeco Spector Ion Beam Deposition (IBD)
- Client Computer: Dell (No hard drive)
- Server Computer: Dell (No hard drive)
- Vacuum Control Module ITAVS
- CTI OB 400 Cryopump
- Leybold R8200 Compressor
- Fore Vacuum Pump (Leybold Oil Pump)
- Fore Vacuum Pump (Edwards GSD-120B)
- Ion Vacuum Gauge
- Low Vacuum Gauge
- MKS 670 Vacuum Controller
- Main High Vacuum Valve (VAT)
- Secondary High Vacuum Valve (VAT 14046-PE44-0060/0166)
- Coarse Throttle Valve
- Fine Throttle Valve
- Fore Vacuum Valve
- Gas Flow Meters (6 units)
- Target Assembly: 2 sets (including magnets)
- Magnetron Amplifier (SR810, SR830): 2 sets
- Wafer Stage Motor & Drive
- Mask Motor & Drive
- Target Translation System (modified to pneumatic)
- Optical Components: Removed, Only ion source control module retained
- Heating System: Controller modified
- Vacuum Chamber Internal Panels
Ion Source Module RF 2001:
- 16 Ion Source: Normal
- 12 Ion Source: Normal
Ion Source Module RF 2051:
- 16 Ion Source: Normal
- 12 Ion Source: Normal
Ion Source Module Rf 2070:
- 16 Ion Source: Normal
- 12 Ion Source: Normal
Ion Source Module RF 55:
- 16 Ion Source: Normal
- 12 Ion Source: Functional but display not working
Neutralizer:
- 16 ion Source: Normal
- 12 ion Source: Normal
Ion Source Shield:
- 16 Ion Source: Normal
- 12 Ion Source: Normal
Ion Source Main Body & Matching Chamber:
- 16 Ion Source: Normal
- 12 Ion source: Normal
Flow Control Module GFC 100 U:
- 16 Ion Source: Normal
- 12 ion Source: Normal

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