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Tel Unity ME 8555 SSS Dry Etcher
Tel Unity ME 8555 SSS Dry Etcher
Tel Unity ME 8555 SSS Dry Etcher

Tel Unity ME 8555 SSS Dry Etcher

Asset #: 156404

Make: Tel

Model: Unity ME 8555 SSS

Wafer Sizes: 8 inch

Last Confirm Date: July 17, 2026

Tel Unity ME 8555 SSS Dry Etcher, 8"
3 Chamber:
- Process chamber 1: SCCM OXIDE LD TYPE
- Process chamber 2: SCCM OXIDE LD TYPE
- Process chamber 3: SCCM OXIDE LD TYPE
- Cassette chamber: Wide Type Slot 25 Slot pitch 1/4 inch Dummy wafer unloading 4 slots
- Chamber Body: Aluminum alumite - Temperature control range Room temperature ~ 60*C
- Chamber O rings: Armor Crystal / Viton
- Manometer Type: Leybold CR090 33.25Pa
- Transport chamber: UNITY Me
- System control box: ECC controller / TC controller
- AC power distribution module: 1 Rack
- VAC / RF control module: 2 Rack
- Line Voltage: 3-phase 4-wire connection VAC 200v
- Line Frequency: 50/60 Hz
- EMO Guard Ring
- Upper Chamber Type: SCCM UEL Body
- Baffle plate: 8K
- Top cooling plate: 320-T15-215-D100
- Upper electrode: 320-T5*5-215-75(CEL)
- Shield ring: T5-280
Missing Parts:
- No SMIF (i.e. open cassette loading)
- Floppy drive: Floppy drive
- 1D86-023244-14: MO drive communication cable
- 1D86-023248-15: MO drive power cable
- 1D80-001496-14: Front monitor
- 1D80-001496-14: Maintenance controller
- 1D10-314636-12: Force inlet cover
- 1810-329468-12: Slit gate valve body
- 046-001311-1: Signal tower
- 1D80-004078-11: ECC power supply
- ECC rack boards: ECC rack boards
- 1D80-004121-12: TOP match
- 1D80-004982-1*: Matcher controller
- 1810-121864-11: ESC
- 1D80-005605-12: Process chamber manometer
- 1D80-004407-11: Back pressure controller (center)
- 1D80-004407-11: Back pressure controller (Edge)
- 036-005057-1: ATM Sensor
- 1D81-000486-11: Pressure controller(PB-6)
- 1D81-000486-11: Pressure controller(PB-6)
- 1D10-350848-11: Card rack acrylic cover
- 017-005557-1: TOP chiller hose
- 1D10-410483-11: TOP RF cable support (main unit)
- 020-001089-1: TOP RF cable support screw
- 1D80-004539-11: Foreline valve for turbo pump exhaust
- 1810-430592-11: UV cut film for side endpoint windows
- 040-002527-1: Unit BOX lower part FAN
- 1D81-000099-J5: MAIO board
- 1D81-000099-J5: MAIO board
- 1D80-003894-12: Combination gauge
- 1D80-004695-11: Filtering for combination gauge
- 027-003542-1: O-ring for combination gauge
- 1D80-004122-12: BOT match
- 1D80-005607-12: Manometer for self-check
- 1D81-000096-B4: GAS board (1)
- 012-008460-1: Air operating valve in GAS BOX (G5)
- 1D80-003246-1*: MLT DC BOX200
- 1D80-003054-13: TOP RF generator
- 1D80-003143-12: BOT RF generator
- 1D81-000405-13: ILK board
- 1D81-00000921B: IO board
- 1D08-000098-13: DIO board
- 1D08-000096-15: GAS board
- 1D08-000096-15: GAS board
- 1D80-004816-14: VAT valve Assy
2001 Vintage

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