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Axcelis NV 8250 Implanter
Axcelis NV 8250 Implanter
Axcelis NV 8250 Implanter
Axcelis NV 8250 Implanter
Axcelis NV 8250 Implanter

Axcelis NV 8250 Implanter

Asset #: 156162

Make: Axcelis

Model: NV 8250

Wafer Sizes: 8 inch

Last Confirm Date: July 09, 2026

Axcelis NV 8250 Implanter, 8"
- Power Requirement: 208 VAC, 100 A, 50/60 Hz, 3 Phase
- Energy Range: 0-250 keV
- Programmable Auto Tilt: 0-75 degrees
- Single Stage Extraction: 15-40 keV
- Ion Source Type: ELS
- Source Material Type: Moly
- Energy Filter System Option
- Parallel Beam using Hybrid Scanning
- Electrostatic Chuck (ESC)
- ESC Angle Correction
- 90 degrees Radially Indexed Dipole Magnet
- Signal Tower
- SECS II / GEM Interface
Cassette Interface:
- Asyst Bolt-On SMIF (2)
- Cassette Stages (3)
- Automatic Flat/Notch Alignment
- Programmable Flat Orient
Controller:
- Sun Sparc Station V
- Application SW Ver. 4.3.2
- Auto Start-Up & Computer Monitoring
Pump / Cryogenics:
- Source Pump: TMP
- Beam Pump: TMP (2)
- Beam Pump: Cryo Pump (8" Torr, Non On-board)
- End Station Pump: 2 Cryo Pump (8" Torr, Non On-Board)
- Cryo Compressor: CTI 8500
- Remote Disk Chiller
Gas Configuration:
- AsH3 - SDS
- PH3 - SDS
- BF3 - SDS
- Ar - HP

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