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ONTO / Rudolph S 300 ULTRA II Transparent Film Metrology System.
ONTO / Rudolph S 300 ULTRA II Transparent Film Metrology System.
ONTO / Rudolph S 300 ULTRA II Transparent Film Metrology System.
ONTO / Rudolph S 300 ULTRA II Transparent Film Metrology System.

ONTO / Rudolph S 300 ULTRA II Transparent Film Metrology System.

Asset #: 147935

Make: ONTO / Rudolph

Model: S 300 ULTRA II

Wafer Sizes: 12 inch

Last Confirm Date: December 22, 2025

ONTO / Rudolph S 300 ULTRA II Transparent Film Metrology System., 12"
- 50/60 Hz
- 100-240 Vac 1 N/PE
- Robot Finger Type: Brooks ABM 407
- Load Port Type: Brooks FIXLOAD (x2) with FOUP capability
- Light source: laser 633 nm HeNe and solid-state 780 nm , and 905 nm
- UV lamp: 190nm to 400nm
- Spectroscopic reflectoment covering 190 nm to 905 nm
- Spot size: 50 μm DUV and 2.5 μm/15 μm /50 μm (high medium and low magnification) visible /IR
- Enhanced modulated scanning monochrometer for DUV range
- OMA detector for the visible/IR range
2005 Vintage

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