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Lam / Novellus Concept Two Dual Sequel CVD (Chemical Vapor Deposition)

Asset #: 147636

Make: Lam / Novellus

Model: Concept Two Dual Sequel

Wafer Sizes: 8 inch

Last Confirm Date: December 17, 2025

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Lam / Novellus Concept Two Dual Sequel CVD (Chemical Vapor Deposition), 8"
- RPC (2)
- Flat Type: Semi Notched
- Wafer Substrate: Silicon
- Software Version & Build: Sequel 4.94 B 38
- DLVM Mfg Type: Refurb - SSEMVIT
- PM 2 (Left): Sequel
- PM 2 (Left) Mfg Type: Refurb - SSEMVIT
- PM 3 (Center): Sequel
- PM 3 (Center) Mfg Type: Refurb - SSEMVIT
- PM 4 (Right): Blank-Off
- Cable Length: 75 ft
- NSRTBD, Gas Box Config
DLCM:
- Wafer Cassette: Entegris FA 200-8 MT 7902
- Front End Option: SMIF Ready
- User Interface Option: SMIF Ready
- User Interface Options: Cleanroom (Right Side)
- Paddle and Arc Kits: STD
- Cool Station Options:4 Shelf Cool Station
- Particle Check Options: Particle Sensor Manifold
- Manometers: Heated
- Pressure Control: MKS
- Facilities Kits: Bottom
- Light Towers: 3 Light - RYG
- Light Tower Mounting: Staff Mount
- TM Cover Options: STD Cover
- MPD: Dual
Sequel X:
- Showerhead Options: AL 6061 Showerheads
- RF Switching: No
- Process Type: Other, Submit NSR
- Process Gas Line Qty: NSR required for GB config
- ILDS Kit Options: No ILDS
- Gas Box Exhaust / Facilities: Bottom
- Manometers: Heated
- Pressure Control MKS
- PM Exhaust / Facilities: Bottom
- Leak Check Options: Lk Chck Rr Wndw Adptr RGA
- Leak Check Exhst Vlv Options: No Leak Check Exhst Vlv Kit
- Heater Block Options: Non Pinned Heater Block
- Fork Kit Options: Ceramic Plate with Standard
- LF Generator Options: Used PDX 1400
- HF Genertor Options: New Paramount 6K
- Throttle Valve Options: Without HYT
- End Point Kit Options: Dual for C 2 F 6 / C 3 F 8 Gasses
- Sequel Tool Kits: Docking Caster Kit

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