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KLA Surfscan SP 1 TBI Inspection System
KLA Surfscan SP 1 TBI Inspection System
KLA Surfscan SP 1 TBI Inspection System
KLA Surfscan SP 1 TBI Inspection System
KLA Surfscan SP 1 TBI Inspection System

KLA Surfscan SP 1 TBI Inspection System

Asset #: 146030

Make: KLA

Model: Surfscan SP 1 TBI

Wafer Sizes: 8, 12 inch

Last Confirm Date: December 03, 2025

KLA Surfscan SP 1 TBI Inspection System, 8", 12"
- 208-240 V, Single phase
- 50/60 Hz
- Full Load Amps: 24 A
- Machine Main Breaker Rating: 30 A
- Ampere Rating of Largest Load: 12 A
- Open Vacuum Chuck Handler (200/300 mm)
- Bright Field (DIC) Option, P/N: 515990
- XY Coordination, P/N: 0082158-000
- Bright Field Sizing, P/N: 0082158-000
- Haze Normalization, Haze Analysis, P/N: 0081928-000
- SEC-1, P/N: 0021643-000
- HSMS, P/N: 528080
- PC-NFS Cient, P/N: 556025
- Desktop PC Software Option, P/N: 528170
- Color Printer Equivalent to HP Business Inkjet 2300, P/N: T 02379
・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil
・Laser (in use for 2 years)
・CD drive and FD drive damaged
・No issues with performance
2001 Vintage

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