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Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)

Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)

Asset #: 133886

Make: Aixtron

Model: G 5 HT IC 2

Last Confirm Date: October 27, 2025

Aixtron G 5 HT IC 2 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
- Software Version: AIXACT 6.0.0.27
- PLC: 6.0.3830
- SLC
- Process: InGaN MOCVD Epitaxy
- Wafer: 6 x 6"
- Metal Organic Sources: TMln x 3, 100 ppm SiH4 in Ar x 20 x 2
- Concentration Monitors (2) : Epison4 x 3 for TMln, Epison4 x 2 for TEGa
- Chiller Baths (6 available for MO sources)
- Purifiers: Entegris Getters for H2 & N2, Nanochem for NH3
- Filters
- Heating System: RF Coil with Trumpf Huttinger RF Generator TruHeat 7120
- Glove Box: MBraun Nitrogen Glovebox with Controller
- Standard Exhaust System
- Process Pump: Ebara ESA 80 W
- DOR & Glove BoxPumps: Anesta Iwata Scroll Pump (2)
- Abatement: Unisem UN 2000 A-WHG (shared across 2 reactors)
- Reactor Chiller: Tek-Temp Recirculating Closed Loop Chiller
- Ceiling Temperature Controle
-In-Situ Pyrometry (available)
- Gas Foil Rotation (GFR): Individual GFR Control for Each Puck
- Spare Channels
2010 Vintage

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