NEXX Spare Parts
- CRS P/N: K 11008984 Contact Seal Ring (CSR): 8", notched
- CRS P/N: K 111009048 Contact Seal Ring (CSR): 6", Flat
- CRS P/N: K 11009159 Contact Seal Ring (CSR): 4", Flat, Qty 2 (1 refurbished)
- CRS P/N: K1009300 Contact Seal Ring (CSR): 8", Flat
- P/N: NXK 11207141 Wafer Holder: 8", Flat
- P/N: K 11207144 Wafer Holder: 6", Flat
- P/N: K 53001008 Analog Level Sensor
- P/N: S 83145 MO Servo Motor
- P/N: NXK 11200733 Motor, Tilt Loader
- P/N: K 100756000 Plate, Vacuum, Waferhand
- P/N: NXK 41001031 Timing Belt
- P/N: 64116864 A 947 Gearbox: 10:1
- Omron P/N: G 9 SXNSA 222 T 03 RT Safety Relay Unit
- P/N: 750842 Safety Relay Unit
- Thermo Fisher Scientific P/N: 714 030500 FTIR Germanium Crystal